Match List I with List II List I (Diffusion profile measurement technique) List II (Characteristics) A. Capacitance - voltage 1. Not suitable for diffusion studies in VLSI process when shallow junction profiles are of interest B. Differential - conductance 2. Needs Van dc graff generator C. Spreading resistance 3. Two–point probe arrangement D. RBS 4. Concentration near the junction space-charge region at zero bias cannot be measured Choose the correct answer from the options given below:
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